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[纳米物理与器件实验室系列学术报告(97)] Low Temperature Supercritical Fluids Treatment to Improve Performance of Materials and Electron Devices
时间: 2017年08月22日 14:30
地点: 中科院物理研究所M楼二层253会议室
报告人: Ting-Chang Chang (张鼎张教授)

Department of Physics, National Sun Yat-sen University, Kaohsiung (国立中山大学,台湾)

报告人简介
Professor Ting-chang Chang is the Chair Professor of Sun-Yat-sen University from Taiwan. He received PhD degree from department of Department of Electronics Engineering of Chaio-Tung University in 1994, and started to conduct research work in Sun-Yat-sen University since 1999. Prof. Chang’s research interests mainly focus on advanced semiconductor devices, and his work contributes to the respective development of novel non-volatile memory device, advanced transistor device and display device technologies. He has published more than 400 SCI papers with citations of 3880 and 49 United States invention patents. Prof. Chang’s team closely cooperate with major industry leaders such as TSMC, UMC, AUO, and InnoLux via joint industry-academia projects and technology transfers. For Prof. Chang’s dedication to semiconductor research, he was awarded recognition for “Outstanding Research” by the Ministry of Science and Technology of Taiwan. He has also won the “Industry-university Cooperation Prize” from the Ministry of Education, Taiwan.

报告摘要:
Our research team has developed a material-modified technology induced by supercritical fluid (SCF) treatment. By properly adjusting temperature and pressure, many materials can enter the SCF state. The SCF is a special material state between liquid and gaseous state, which also combines advantages of high solubility from liquid as well as high penetration capability of gas. After introducing our SCF technology and treatment to the electron devices, we found that defects from bulk or heterojunction can be successfully suppressed based on different modifiers. The characteristics of material, therefore, can be further improved. Besides, the SCF treatment has benefits of near room temperature process. Thus, electron devices or materials irresistible to high temperature can be treated by our SCF treatment to achieve identical results by high temperature heat treatment. This talk will mainly focus on the improvements of various electron devices induced by our SCF treatment.

关键词:Supercritical Fluid (SCF)、Electron Devices

邀请人: 滕静  (82649906)


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